Scope

The 1st Dry Process School will be held at the Media Hall, Center for Information Technology, Ehime University (CITE), from 11 to 12 November, 2025, right before and in conjunction with the 46th International Symposium on Dry Process (DPS2025). The goal of the Dry Process School is to provide an intensive course program to graduate students, postdoctoral researchers, and industry engineers in their early career stages to receive additional training in semiconductor manufacturing dry processes, including fundamental plasma processing and semiconductor device physics. The participants are expected to have basic knowledge in undergraduate-level physics and chemistry. As the program shows, the lectures are given by world-renowned scientists in this field. All courses are held in English.

Confirmed Lecturers

• Zoltán Donkó (Wigner Research Centre for Physics)
• Vincent M. Donnelly (U. Houston)
• Rémi Dussart (U. Orléans)
• Richard A. Gottscho (SemiSan: retired CTO Lam Research)
• Byungjo Kim (Ulsan National Institute of Science & Technology)
• Masaharu Kobayashi (U. Tokyo)
• Mark J. Kushner (U. Michigan, Ann Arbor)
• Christophe Vallee (U. Albany)

International Symposium on Dry ProcessDPS2025

This school is held in conjunction with the DPS2025:
46th International Symposium on Dry Process (DPS2025) on Nov. 13-14, 2025.

What's newRecent updates

Late Sept.Important

Early registration will close

Late JuneImportant

Registration will open

May 07 2025Announcement

Confirmed lecturers posted

Apr. 17 2025Announcement

Website open

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