Day 1: Nov. 11, 2025
(Media Hall, CITE)

09:00 - 09:15 Opening
1. 09:15 - 10:45
   Richard Gottscho (SemiSan: retired CTO Lam Research)
   Semiconductor industry: present and future
2. 11:15 - 12:45
   Zoltán Donkó (Wigner Research Centre for Physics)
   Plasma physics for semiconductor processing
12:45 - 14:15 Lunch break (lunch will be served)
3. 14:15 - 15:45
   Mark J. Kushner (U. Michigan, Ann Arbor)
   Gas-phase chemistry for plasma processing
4. 16:15 - 17:45
   Rémi Dussart (U. Orléans)
   Etching technologies

Reception: Nov. 11, 2025
(Location: TBD)

Day 2: Nov. 12, 2025
(Media Hall, CITE)

1. 09:00 - 10:30
   Masaharu Kobayashi (U. Tokyo)
   Semiconductor device technologies
2. 11:00 - 12:30
   Vincent Donnelly (U. Houston)
   Plasma-surface interactions and surface chemistry
12:45 - 14:15 Lunch break (lunch will be served)
3. 14:00 - 15:30
   Christophe Vallee (U. Albany)
   Atomic layer processes
4. 16:00 - 17:30
   Byungjo Kim (Ulsan National Institute of Science & Technology)
   TCAD and data-scientific approach to semiconductor processing
17:30 - 17:40 Closing